Abstract
The evolution of an amorphous-like to a polycrystalline microstructure and the composition of Ta-Si-N nanocomposites was controlled by nitrogen flow ratios during reactive cosputtering. It influences the chemical bonding, electrical resistivity and optoelectronic luminescent properties of Ta-Si-N films. Amorphous-like Ta-Si-N films formed at a Si/(Si + Ta) ratio larger than 6% had much finer grains, smoother morphology, lower Ta 4f7/2 binding energy and lower resistivity compared to polycrystalline films. A strong visible photoluminescence was observed at Ta53Si7N40 compositions for a peak maximum at 554 nm (2.24 eV).
Original language | English |
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Pages (from-to) | 611-614 |
Number of pages | 4 |
Journal | Scripta Materialia |
Volume | 57 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2007 Oct 1 |
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
- Metals and Alloys