Effect of nitrogen content at coating film and film thickness on nanohardness and Young's modulus of hydrogenated carbon films

Engineering & Materials Science

• Carbon films 100%
• Nanohardness 96%
• Film thickness 69%
• Elastic moduli 53%
• Hardness 50%
• Coatings 47%
• Indentation 34%
• Amorphous carbon 16%
• Nanoindentation 12%
• Gas mixtures 12%
• Delamination 10%
• Plastic deformation 9%
• Substrates 7%

Chemical Compounds

• Young's Modulus 67%
• Nitrogen 38%
• Liquid Film 30%
• Carbon Atom 30%
• Plastic Deformation 11%
• Delamination 10%
• Volume 10%
• Amorphous Material 6%
• Gas 4%
• Energy 4%
• Mixture 4%
• Time 3%