TY - JOUR
T1 - Effect of periods on wear performance of TiN/AlN superlattice films
AU - Yao, S. H.
AU - Kao, W. H.
AU - Su, Y. L.
AU - Liu, T. H.
N1 - Funding Information:
The authors wish to express their thanks for the finical support by National Science Council under the contract of NSC92—2212—E—309—001. Grateful thanks are specially dedicated to Mr. K.L. Yei for help in executing the experiments and to Mr. W.C. Liu for deposition in Metal Industrials Research and Development Center.
PY - 2005/2/15
Y1 - 2005/2/15
N2 - In this study, the TiN/AlN superlattice films were prepared using a newly developed high-rate reactive sputtering set-up, which featured an unbalanced and a balanced magnetron sputtering system. The former was employed to deposit the A1N film, and the latter the TiN film. The aim of this study was to obtain, through controlling the deposition conditions, a group of TiN/AlN superlattice films with various periods, and then to investigate the influence of periods on their fundamental properties and wear behavior. The results revealed that the TiN/AlN superlattice films with periods ranging from 2.4 to 67.6 nm were obtained. At periods ≦ 3.6 nm, the films had extremely high hardness, excellent adhesion and wear performance, as compared with the traditional single-layer TiN film.
AB - In this study, the TiN/AlN superlattice films were prepared using a newly developed high-rate reactive sputtering set-up, which featured an unbalanced and a balanced magnetron sputtering system. The former was employed to deposit the A1N film, and the latter the TiN film. The aim of this study was to obtain, through controlling the deposition conditions, a group of TiN/AlN superlattice films with various periods, and then to investigate the influence of periods on their fundamental properties and wear behavior. The results revealed that the TiN/AlN superlattice films with periods ranging from 2.4 to 67.6 nm were obtained. At periods ≦ 3.6 nm, the films had extremely high hardness, excellent adhesion and wear performance, as compared with the traditional single-layer TiN film.
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U2 - 10.1016/j.msea.2004.10.017
DO - 10.1016/j.msea.2004.10.017
M3 - Article
AN - SCOPUS:13144264103
SN - 0921-5093
VL - 392
SP - 380
EP - 385
JO - Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing
JF - Materials Science & Engineering A: Structural Materials: Properties, Microstructure and Processing
IS - 1-2
ER -