Effect of periods on wear performance of TiN/AlN superlattice films

S. H. Yao, W. H. Kao, Y. L. Su, T. H. Liu

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effect of periods on wear performance of TiN/AlN superlattice films'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy