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Effect of rapid thermal annealing on beryllium implanted p-type GaN

  • Hung Wen Huang
  • , C. C. Kao
  • , J. Y. Tsai
  • , C. C. Yu
  • , C. F. Chu
  • , J. Y. Lee
  • , S. Y. Kuo
  • , C. F. Lin
  • , H. C. Kuo
  • , S. C. Wang

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