Effect of r.f. sputtering parameters on ZnO films deposited onto GaAs substrates

C. T. Lee; Y. K. Su; H. M. Wang

doi:10.1016/0040-6090(87)90101-5

Effect of r.f. sputtering parameters on ZnO films deposited onto GaAs substrates

C. T. Lee, Y. K. Su, H. M. Wang

Department of Photonics

Research output: Contribution to journal › Article › peer-review

44 Citations (Scopus)

Abstract

In order to compensate the piezoelectrical property of GaAs-based material for monolithic integrated acousto-optic circuit applications, a ZnO film with a highly preferred orientation should be deposited. R.f. sputtering was employed to deposit ZnO films with various technological parameters. The optimal conditions to deposit high quality ZnO film onto GaAs-based substrates were deduced and investigated. Low loss surface acoustic wave devices fabricated on ZnO/GaAs wafers were obtained. The total insertion loss measured at a centre frequency of 25.37 MHz was 20 dB.

Original language	English
Pages (from-to)	283-289
Number of pages	7
Journal	Thin Solid Films
Volume	150
Issue number	2-3
DOIs	https://doi.org/10.1016/0040-6090(87)90101-5
Publication status	Published - 1987 Jul 6

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/0040-6090(87)90101-5

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AB - In order to compensate the piezoelectrical property of GaAs-based material for monolithic integrated acousto-optic circuit applications, a ZnO film with a highly preferred orientation should be deposited. R.f. sputtering was employed to deposit ZnO films with various technological parameters. The optimal conditions to deposit high quality ZnO film onto GaAs-based substrates were deduced and investigated. Low loss surface acoustic wave devices fabricated on ZnO/GaAs wafers were obtained. The total insertion loss measured at a centre frequency of 25.37 MHz was 20 dB.

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Effect of r.f. sputtering parameters on ZnO films deposited onto GaAs substrates

Abstract

All Science Journal Classification (ASJC) codes

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