Effect of silver dopants on the ZnO thin films prepared by a radio frequency magnetron co-sputtering system

Fang Cheng Liu, Jyun Yong Li, Tai Hong Chen, Chun How Chang, Ching Ting Lee, Wei Hua Hsiao, Day Shan Liu

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Ag-ZnO co-sputtered films at various atomic ratios of Ag (Ag/(Ag + Zn) at.%) were prepared by a radio frequency magnetron cosputtering system, using the co-sputtered targets of Ag and ZnO. The activation of the Ag acceptors (AgZn) and the formation of the Ag aggregations (Ag0) in the ZnO matrix were investigated from XRD, Raman scattering, and XPS measurements. The Ag-ZnO co-sputtered film behaving like a p-type conduction was achievable after annealing at 350 ° C under air ambient for 1 h.

Original languageEnglish
Article number797
JournalMaterials
Volume10
Issue number7
DOIs
Publication statusPublished - 2017 Jul 14

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

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