Effect of substrate orientation on arsenic precipitation in low-temperature-grown GaAs

W. N. Lee, Y. F. Chen, J. H. Huang, X. J. Guo, C. T. Kuo

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Abstract

Arsenic precipitation in "superlattice" structures of alternately undoped and [Si] = 3 × 1018cm--doped GaAs grown at 250°C on (100), (311)A, and (311)B GaAs substrates has been studied using transmission electron microscopy. It is found that upon postgrowth annealing at 800°C, As precipitates are nearly confined in the Si-doped regions, forming two-dimensional cluster arrays located approximately at the center of each Si-doped layer. The results also show that the As precipitates in the (311)B substrate are slightly denser and larger than those in the (311)A substrate and both are markedly denser and larger than those in the (100) substrate. This can be attributed to the varying excess arsenic incorporations in differently orientated substrates.

Original languageEnglish
Pages (from-to)6399-6402
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume44
Issue number9 A
DOIs
Publication statusPublished - 2005 Sep 8

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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