Effect of the heating rate for preheating process on the composition and phase transformation of sol-gel derived lead zirconate titanate thin film

Tien I. Chang; Jow Lay Huang; Hong Ping Lin; Sheng Chang Wang; Long Wu; Chen Fu Lin

doi:10.1016/j.apsusc.2004.07.069

Effect of the heating rate for preheating process on the composition and phase transformation of sol-gel derived lead zirconate titanate thin film

Tien I. Chang, Jow Lay Huang, Hong Ping Lin, Sheng Chang Wang, Long Wu, Chen Fu Lin

Research output: Contribution to journal › Conference article › peer-review

3 Citations (Scopus)

Abstract

Lead zirconate titanate (PZT, 53/47) thin firms were successfully fabricated on multilayers substrate by the spin-coating sol-gel process. The effects of different heating rates on the composition and phase transformation of PZT films were discussed. This study focused on the slow heating rate (1°C/min) to the first preheating step (150°C) and to second pyrolysis step (350°C). By XRD method, PZT films contained entirely pure perovskite phase annealing at 700°C for 30 min for the slow heating rate procedure. By using EPMA analysis, the composition of PZT thin film derived by this procedure was indeed located at the MPB region. Furthermore, the phase coexistence was evidenced by the BEI analysis.

Original language	English
Pages (from-to)	55-68
Number of pages	14
Journal	Integrated Ferroelectrics
Volume	75
DOIs	https://doi.org/10.1016/j.apsusc.2004.07.069
Publication status	Published - 2005
Event	Seventeenth International Symposium on Integrated Ferroelectrics, ISIF-17 - Shanghai, China Duration: 2005 Apr 17 → 2005 Apr 20

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Control and Systems Engineering
Ceramics and Composites
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/j.apsusc.2004.07.069

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title = "Effect of the heating rate for preheating process on the composition and phase transformation of sol-gel derived lead zirconate titanate thin film",

abstract = "Lead zirconate titanate (PZT, 53/47) thin firms were successfully fabricated on multilayers substrate by the spin-coating sol-gel process. The effects of different heating rates on the composition and phase transformation of PZT films were discussed. This study focused on the slow heating rate (1°C/min) to the first preheating step (150°C) and to second pyrolysis step (350°C). By XRD method, PZT films contained entirely pure perovskite phase annealing at 700°C for 30 min for the slow heating rate procedure. By using EPMA analysis, the composition of PZT thin film derived by this procedure was indeed located at the MPB region. Furthermore, the phase coexistence was evidenced by the BEI analysis.",

author = "Chang, {Tien I.} and Huang, {Jow Lay} and Lin, {Hong Ping} and Wang, {Sheng Chang} and Long Wu and Lin, {Chen Fu}",

year = "2005",

doi = "10.1016/j.apsusc.2004.07.069",

language = "English",

volume = "75",

pages = "55--68",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

publisher = "Taylor and Francis Ltd.",

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TY - JOUR

T1 - Effect of the heating rate for preheating process on the composition and phase transformation of sol-gel derived lead zirconate titanate thin film

AU - Chang, Tien I.

AU - Huang, Jow Lay

AU - Lin, Hong Ping

AU - Wang, Sheng Chang

AU - Wu, Long

AU - Lin, Chen Fu

PY - 2005

Y1 - 2005

N2 - Lead zirconate titanate (PZT, 53/47) thin firms were successfully fabricated on multilayers substrate by the spin-coating sol-gel process. The effects of different heating rates on the composition and phase transformation of PZT films were discussed. This study focused on the slow heating rate (1°C/min) to the first preheating step (150°C) and to second pyrolysis step (350°C). By XRD method, PZT films contained entirely pure perovskite phase annealing at 700°C for 30 min for the slow heating rate procedure. By using EPMA analysis, the composition of PZT thin film derived by this procedure was indeed located at the MPB region. Furthermore, the phase coexistence was evidenced by the BEI analysis.

AB - Lead zirconate titanate (PZT, 53/47) thin firms were successfully fabricated on multilayers substrate by the spin-coating sol-gel process. The effects of different heating rates on the composition and phase transformation of PZT films were discussed. This study focused on the slow heating rate (1°C/min) to the first preheating step (150°C) and to second pyrolysis step (350°C). By XRD method, PZT films contained entirely pure perovskite phase annealing at 700°C for 30 min for the slow heating rate procedure. By using EPMA analysis, the composition of PZT thin film derived by this procedure was indeed located at the MPB region. Furthermore, the phase coexistence was evidenced by the BEI analysis.

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DO - 10.1016/j.apsusc.2004.07.069

M3 - Conference article

AN - SCOPUS:33645527240

VL - 75

SP - 55

EP - 68

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

SN - 1058-4587

T2 - Seventeenth International Symposium on Integrated Ferroelectrics, ISIF-17

Y2 - 17 April 2005 through 20 April 2005

ER -

Effect of the heating rate for preheating process on the composition and phase transformation of sol-gel derived lead zirconate titanate thin film

Abstract

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