Effect of the heating rate for preheating process on the composition and phase transformation of sol-gel derived lead zirconate titanate thin film

Tien I. Chang, Jow-Lay Huang, Hong-Ping Lin, Sheng Chang Wang, Long Wu, Chen Fu Lin

Research output: Contribution to journalConference article

2 Citations (Scopus)


Lead zirconate titanate (PZT, 53/47) thin firms were successfully fabricated on multilayers substrate by the spin-coating sol-gel process. The effects of different heating rates on the composition and phase transformation of PZT films were discussed. This study focused on the slow heating rate (1°C/min) to the first preheating step (150°C) and to second pyrolysis step (350°C). By XRD method, PZT films contained entirely pure perovskite phase annealing at 700°C for 30 min for the slow heating rate procedure. By using EPMA analysis, the composition of PZT thin film derived by this procedure was indeed located at the MPB region. Furthermore, the phase coexistence was evidenced by the BEI analysis.

Original languageEnglish
Pages (from-to)55-68
Number of pages14
JournalIntegrated Ferroelectrics
Publication statusPublished - 2005 Dec 1
EventSeventeenth International Symposium on Integrated Ferroelectrics, ISIF-17 - Shanghai, China
Duration: 2005 Apr 172005 Apr 20


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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