TY - JOUR
T1 - Effect of thickness on the structural and optical properties of ZnO films by r.f. magnetron sputtering
AU - Lin, Su Shia
AU - Huang, Jow Lay
N1 - Funding Information:
The authors would like to thank the National Science Council of the ROC for its financial support under contract no. NSC-92-2216-E006-029.
PY - 2004/7/22
Y1 - 2004/7/22
N2 - In this study, the ZnO films were deposited to different thicknesses by r.f. magnetron sputtering. X-Ray diffraction and pole-figure analysis were used to study the crystallinity and crystal orientation. The results showed that ZnO films deposited to a thickness below 500 nm were polycrystalline with a c-axis preferential orientation. However, ZnO films, 500 or 600 nm in thickness, exhibited good self-texture. The optical properties of ZnO films did not depend significantly on the crystallographic orientation or degree of texturing. They were mainly affected by the grain size and carrier concentration.
AB - In this study, the ZnO films were deposited to different thicknesses by r.f. magnetron sputtering. X-Ray diffraction and pole-figure analysis were used to study the crystallinity and crystal orientation. The results showed that ZnO films deposited to a thickness below 500 nm were polycrystalline with a c-axis preferential orientation. However, ZnO films, 500 or 600 nm in thickness, exhibited good self-texture. The optical properties of ZnO films did not depend significantly on the crystallographic orientation or degree of texturing. They were mainly affected by the grain size and carrier concentration.
UR - http://www.scopus.com/inward/record.url?scp=3042643504&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=3042643504&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2003.11.014
DO - 10.1016/j.surfcoat.2003.11.014
M3 - Article
AN - SCOPUS:3042643504
SN - 0257-8972
VL - 185
SP - 222
EP - 227
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
IS - 2-3
ER -