Effect of UV-ozone treatment on the performance of ZnO TFTs fabricated by RF sputtering deposition technique

Jia Ling Wu, Han Yu Lin, Po Hung Kuo, Bo Yuan Su, Sheng-Yuan Chu, Yu Cheng Chen, Ssu Yin Liu, Chia Chiang Chang, Chin Jyi Wu

Research output: Contribution to journalArticle

10 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science