Effect of ZnO buffer layer on the bending durability of ZnO: Ga films grown on flexible substrates: Investigation of surface energy, electrical, optical, and structural properties

  • Jia Ling Wu
  • , Yu Cheng Chen
  • , Han Yu Lin
  • , Sheng Yuan Chu
  • , Chia Chiang Chang
  • , Chin Jyi Wu
  • , Yung Der Juang

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

ZnO:Ga (GZO) transparent conducting oxide (TCO) films are deposited on flexible polyethersulfone (PES) substrates using the radio frequency sputtering technique. The bending durability of flexible TCOs is improved by inserting 100-nm-thick ZnO buffer layers. The strain of the samples with and without buffer layers arising from bending is studied using X-ray diffraction. After the insertion of 100-nm-thick ZnO buffer layers, the strain of GZO films without ZnO after outward and inward bending for 2000 cycles decreases from $2.063× 10-3 and 2.203× 10-3 to 1.74× 10-3 and 1.966× 10-3, respectively. Such strain variation is caused by the difference in adhesive force at the surface of 100-nm-thick ZnO/PES and PES. The surface energy of PES and 100-nm-thick ZnO/PES bent outwards and inwards for 2000 cycles increased from 34.38 and 30.56 to 36.45 and 36.03 mJ m2, respectively.

Original languageEnglish
Article number6527295
Pages (from-to)2324-2330
Number of pages7
JournalIEEE Transactions on Electron Devices
Volume60
Issue number7
DOIs
Publication statusPublished - 2013

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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