退火在鈦/砷化鎵薄膜奈米壓痕行為及化合物形成上之效應分析

Translated title of the contribution: Effects of Annealing on Nanoindentation Behaviour and Compounds Formation of Ti/GaAs Thin Film

Woei Shyan Lee, Chung Chia Lo

Research output: Contribution to journalArticlepeer-review

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Engineering & Materials Science