@inproceedings{4e042d9462d740839a4a6216c566d415,
title = "Effects of Average Power-Handling Capability on DC-Sputtering Aluminum Nitride Thin Film on Ceramic Substrate",
abstract = "In this paper, we presented a method to investigate the effects of average power-handling capability (APHC) on dc reactive magnetron sputtering aluminum nitride (AlN) thin film coplanar waveguide (CPW) line fabricated on the ceramic substrate. We discussed the effects of material properties, microwave characteristics, and APHC on the thin-film CPW line. Using the AlN thin-film passivation on the ceramic substrate can effectively improve the thermal conductivity and enhance the APHC of a thin-film CPW line. Measured microwave losses (total of conductor loss α cf) and dielectric loss α df), dielectric constant, and APHC were extracted from S-parameters that were measured up to 10 GHz. This method can be applied in low-temperature cofired ceramic techniques (LTCC).",
author = "Tai, {Tzu Chun} and Wu, {Hung Wei} and Lin, {Yu Ming} and Wang, {Sin Pei} and Wang, {Yeong Her} and Chang, {Shoou Jinn}",
note = "Funding Information: This work was supported by the Ministry of Science and Technology under Contract MOST 106-3011-E-168-001 and MOST 106-2221-E-168-020. Publisher Copyright: {\textcopyright} 2018 IEEE.; 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018 ; Conference date: 10-06-2018 Through 15-06-2018",
year = "2018",
month = aug,
day = "17",
doi = "10.1109/MWSYM.2018.8439568",
language = "English",
isbn = "9781538650677",
series = "IEEE MTT-S International Microwave Symposium Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1385--1388",
booktitle = "Proceedings of the 2018 IEEE/MTT-S International Microwave Symposium, IMS 2018",
address = "United States",
}