Effects of crystallization on the optical properties of ZnO nano-pillar thin films by sol-gel method

K. J. Chen, F. Y. Hung, S. J. Chang, S. J. Young, Z. S. Hu

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27 Citations (Scopus)


ZnO nano-pillars were prepared on the silica glass by the sol-gel method. The films were crystallized at various crystallized temperatures (600 °C, 650 °C and 700 °C) for 1 h under a pure oxygen atmosphere. The ZnO films had hexagonal structures and preferred a c-axis orientation of (002). Due to the diffused zinc atoms recombining with oxygen atoms at higher temperatures (≥650 °C), the ZnO nano-pillars grew continually from the ZnO grains or the ZnO grain boundaries. When increasing the crystallizing temperature, the quality of ZnO crystallization not only improved, but the ZnO nano-pillars also grew significantly and their length was around 30-150 nm. Notably, a severe decomposition reaction reduced the total volume of crystallization matrix (residual ZnO thin films and increased ZnO nano-pillars). The nano-pillar-thin film of 650 °C not only possessed a better crystallization, but also had the efficacy of nano-pillars that enhanced the optical characteristics. In addition, 5 at.% indium-doped ZnO was also synthesized and then compared with un-doped ZnO to clarify the contribution of indium dopants.

Original languageEnglish
Pages (from-to)1243-1248
Number of pages6
JournalCurrent Applied Physics
Issue number5
Publication statusPublished - 2011 Sept

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Physics and Astronomy(all)


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