Effects of deposition inclination angle on the mechanical, optical and electrical characteristics of Al-doped ZnO films

Tse Chang Li, Jen-Fin Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A flat plate in the deposition stage is designed to be tilted flexibly to form an inclination angle between an ion beam and the direction normal to a polyethylene terephthalate (PET) substrate. Five kinds of PET/aluminum-doped zinc oxide specimen were prepared to examine the effects of inclination angle on the mechanical, optical and electrical properties. Increase in the inclination angle is advantageous for the increase in thin film porosity before reaching its asymptotic value. An appropriate choice in a nonzero inclination angle can increase the mechanical properties in hardness and reduced module and carrier concentration, and decrease the carrier mobility and electrical resistivity of the specimen greatly in a simple way.

Original languageEnglish
Title of host publicationProceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices
Subtitle of host publicationTFT Technologies and FPD Materials
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages151-154
Number of pages4
ISBN (Electronic)9784863484771
DOIs
Publication statusPublished - 2015 Jul 30
Event22nd International Workshop on Active-Matrix Flatpanel Displays and Devices, AM-FPD 2015 - Kyoto, Japan
Duration: 2015 Jul 12015 Jul 4

Publication series

NameProceedings of AM-FPD 2015 - 22nd International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials

Other

Other22nd International Workshop on Active-Matrix Flatpanel Displays and Devices, AM-FPD 2015
CountryJapan
CityKyoto
Period15-07-0115-07-04

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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