Effects of excimer laser illumination on microdrilling into an oblique polymer surface

Chih-Yang Wu, Chun Wei Shu, Zhi Chang Yeh

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

In this work, we present the experimental results of micromachining into polymethy-methacrylate exposed to oblique KrF excimer laser beams. The results of low-aspect-ratio ablations show that the ablation rate decreases monotonously with the increase of incident angle for various fluences. The ablation rate of high-aspect-ratio drilling with opening center on the focal plane is almost independent of incident angles and is less than that of low-aspect-ratio ablation. The results of high-aspect-ratio ablations show that the openings of the holes at a distance from the focal plane are enlarged and their edges are blurred. Besides, the depth of a hole in the samples oblique to the laser beam at a distance from the focal plane decreases with the increase of the distance from the focal plane. The number of deep holes generated by oblique laser beams through a matrix of apertures decreases with the increase of incident angle. Those phenomena reveal the influence of the local light intensity on microdrilling into an oblique surface.

Original languageEnglish
Pages (from-to)842-857
Number of pages16
JournalOptics and Lasers in Engineering
Volume44
Issue number8
DOIs
Publication statusPublished - 2006 Aug 1

Fingerprint

Excimer lasers
Ablation
excimer lasers
ablation
Polymers
Lighting
illumination
Aspect ratio
polymers
Laser beams
low aspect ratio
laser beams
high aspect ratio
Methacrylates
Micromachining
micromachining
drilling
luminous intensity
Drilling
fluence

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

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Effects of excimer laser illumination on microdrilling into an oblique polymer surface. / Wu, Chih-Yang; Shu, Chun Wei; Yeh, Zhi Chang.

In: Optics and Lasers in Engineering, Vol. 44, No. 8, 01.08.2006, p. 842-857.

Research output: Contribution to journalArticle

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