Effects of gas residence time on microwave plasma enhanced CVD of ultrananocrystalline diamond in mixtures of methane and argon without hydrogen or oxygen additives

Ji Heng Jiang, Yueh Chieh Chu, Wei Cheng Fang, Shih Tse Chen, Yonhua Tzeng

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effects of gas residence time on microwave plasma enhanced CVD of ultrananocrystalline diamond in mixtures of methane and argon without hydrogen or oxygen additives'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds