Effects of H2 in indium-molybdenum oxide films during high density plasma evaporation at room temperature

Shi Yao Sun, Jow-Lay Huang, Ding Fwu Lii

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Indium molybdenum oxide (IMO) films were made from an oxidized target with In2O3 and MoO3 in a weight proportion of 95:5 by using a high density plasma evaporation (HDPE). Hydrogen was added to the Ar+O2 gas mixture during the preparation of the IMO films. With hydrogen, the decrease in the resistivity and the broadening of the process window was mainly due to an apparent increase in the mobility. The transmittance in the visible spectral range of IMO films deteriorated with the incorporation of hydrogen. Mo+6/Mo+4 species, -OH fragment, metallic Mo and Mo-O oxides in the film were suggested to affect its electrical and optical properties. Applications as transparent and conducting films for opto-electronic and telecommunication devices would be expected in the near future.

Original languageEnglish
Pages (from-to)6-10
Number of pages5
JournalThin Solid Films
Volume469-470
Issue numberSPEC. ISS.
DOIs
Publication statusPublished - 2004 Dec 22

Fingerprint

Molybdenum oxide
molybdenum oxides
Indium
Plasma density
indium oxides
plasma density
Oxide films
oxide films
Hydrogen
Evaporation
evaporation
room temperature
hydrogen
Conductive films
Gas mixtures
Temperature
Oxides
Telecommunication
gas mixtures
telecommunication

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

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abstract = "Indium molybdenum oxide (IMO) films were made from an oxidized target with In2O3 and MoO3 in a weight proportion of 95:5 by using a high density plasma evaporation (HDPE). Hydrogen was added to the Ar+O2 gas mixture during the preparation of the IMO films. With hydrogen, the decrease in the resistivity and the broadening of the process window was mainly due to an apparent increase in the mobility. The transmittance in the visible spectral range of IMO films deteriorated with the incorporation of hydrogen. Mo+6/Mo+4 species, -OH fragment, metallic Mo and Mo-O oxides in the film were suggested to affect its electrical and optical properties. Applications as transparent and conducting films for opto-electronic and telecommunication devices would be expected in the near future.",
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Effects of H2 in indium-molybdenum oxide films during high density plasma evaporation at room temperature. / Sun, Shi Yao; Huang, Jow-Lay; Lii, Ding Fwu.

In: Thin Solid Films, Vol. 469-470, No. SPEC. ISS., 22.12.2004, p. 6-10.

Research output: Contribution to journalArticle

TY - JOUR

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