Effects of inclination angle during Al-doped ZnO film deposition and number of bending cycles on electrical, piezoelectric, optical, and mechanical properties and fatigue life

Tse Chang Li, Ta Hsuan Kuan, Jen Fin Lin

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2 Citations (Scopus)

Abstract

A flat plate with an adjustable inclination angle between the ion beam and the direction normal to a polyethylene terephthalate (PET) substrate is designed for a deposition stage. Five inclination angles are used to prepare PET/aluminum-doped zinc oxide specimens in order to examine the effects of inclination angle and number of bending cycles on several parameters. The O2 peak intensity ratio (IRO2), obtained from x-ray photoelectron spectroscopy, is identified as one of the controlling factors of the electrical, optical, piezoelectric, and mechanical properties. The effect of inclination angle on IRO2 and the effects of IRO2 on the peak intensity ratios, IRZnO (002) and IRZnO (103), obtained from x-ray diffraction analyses, the composite grain size, and the residual stress in the thin film are investigated systematically. An increase in the inclination angle increases the peak intensity ratios of IRO2 and IRAl2O3, and reduces that of IRZnO. An increase in IRO2 decreases the volume fraction of IRZnO (002) but increases the residual stress of the thin film, and is favorable for the reduction of the composite grain size. The carrier mobility and electrical resistance decrease and carrier concentration increases when IRO2 and IRAl2O3 increase or IRZnO decreases. An increase in the residual stress reduces the fatigue life and piezoelectric coefficient of specimens. The application of a nonzero inclination angle increases the transmittance integration (TI) over the wavelengths of visible light and the intensities of the three peaks in the photoluminescence spectrum. A reduction in film thickness leads to increases in the energy gap and electrical resistance and a decrease in TI.

Original languageEnglish
Article number021501
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume34
Issue number2
DOIs
Publication statusPublished - 2016 Mar 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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