Effects of Mg doping on the gate bias and thermal stability of solution-processed InGaZnO thin-film transistors

Bo Yuan Su, Sheng Yuan Chu, Yung Der Juang, Ssu Yin Liu

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

The effects of magnesium (Mg) doping (molar ratio Mg/Zn = (0-10 at.%)) on solution-processed amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) grown using the sol-gel method are investigated. TFT devices fabricated with Mg-doped films showed an improved field-effect mobility of 2.35 cm2/V s and a subthreshold slope (S) of 0.42 V/dec compared to those of an undoped a-IGZO TFT (0.73 cm2/V s and 0.74 V/dec, respectively), and an on-off current ratio of over 106. Moreover, the 5 at.% Mg-doped TFT device showed improved gate bias and thermal stability due to fewer oxygen deficiencies, smaller carrier concentration, and less interface electron trapping in the a-IGZO films.

Original languageEnglish
Pages (from-to)10-14
Number of pages5
JournalJournal of Alloys and Compounds
Volume580
DOIs
Publication statusPublished - 2013 Jan 1

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry

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