Effects of oxygen contents on the electrical and optical properties of indium molybdenum oxide films fabricated by high density plasma evaporation

Shi Yao Sun, Jow Lay Huang, Ding Fwu Lii

Research output: Contribution to journalArticlepeer-review

47 Citations (Scopus)
Original languageEnglish
Pages (from-to)1235-1241
Number of pages7
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume22
Issue number4
DOIs
Publication statusPublished - 2004 Aug 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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