Effects of photoassisted O2 annealing on the properties of (Ba,Sr)TiO3 thin films

S. J. Chang, J. S. Lee, M. C. Wei, J. F. Chen, C. H. Liu, U. H. Liaw

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)107-111
Number of pages5
JournalJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Issue number1
Publication statusPublished - 2002

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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