@article{06407ed79c3e405284ea47e8232fa07f,
title = "Effects of photoassisted O2 annealing on the properties of (Ba,Sr)TiO3 thin films",
author = "Chang, {S. J.} and Lee, {J. S.} and Wei, {M. C.} and Chen, {J. F.} and Liu, {C. H.} and Liaw, {U. H.}",
note = "Copyright: Copyright 2021 Elsevier B.V., All rights reserved.",
year = "2002",
doi = "10.1116/1.1424274",
language = "English",
volume = "20",
pages = "107--111",
journal = "Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "1",
}