Effects of Pva adding on the microstructure and composition of sol-gel derived PZT films

Tien I. Chang, Sheng Chang Wang, Chen Fu Lin, Jow Lay Huang

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

Lead zirconate titanate (PZT, 53/47) films were successfully fabricated on multi-layers substrate (Pt/Ti/SiO2/Si) by the spin-coating via sol-gel process. A special core-shell structure was formed in the films by the adding of PVA polymer. XRD results showed that PZT films transform to pure perovskite phase entirely after annealing at 700C for 90 min. By EPMA analysis, the composition of PZT thin film derived by this procedure was located at the morphotrophic phase boundary (MPB) region. Furthermore, the composition variations in the core-shell structure were identified by the backscattering electron image (BEI) analysis. With this innovative procedure, crack-free PZT films were successfully obtained.

Original languageEnglish
Pages (from-to)129-138
Number of pages10
JournalIntegrated Ferroelectrics
Volume85
Issue number1
DOIs
Publication statusPublished - 2006 Dec 1
Event18th International Symposium on Integrated Ferroelectrics (ISIF 2006) - Honolulu, Hawaii, United States
Duration: 2006 Apr 232006 Apr 27

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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