Effects of redox treatment on diamondlike carbon coated Mo substrates

Chin Maw Lin, Shoou Jinn Chang, Meiso Yokoyama, I. Nan Lin

Research output: Contribution to journalArticlepeer-review

Abstract

We have studied the effects of oxidation-reduction (redox) treatment applied to Mo substrates on the characteristics of the subsequently deposited diamondlike carbon (DLC) films. Atomic force microscopic (AFM) analyses revealed that the surface of Mo substrates became rougher after the redox treatment. The subsequently deposited DLC films inherited the surface morphology of the Mo substrates. The electron emission characteristics of DLC films coated on redox Mo substrates are superior to those of DLC films coated on normal Mo films which is ascribed to the increase in the field enhancement factor of the DLC films.

Original languageEnglish
Pages (from-to)L76-L78
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume39
Issue number2 A
DOIs
Publication statusPublished - 2000

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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