Effects of sputtering power on optical and electrical properties of al-doped ZnO thin film on flexible substrates

Po Tsung Hsieh, Tse Chang Li, Chung Jen Chung, Hsin Shu Peng, Jen Fin Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

AZO thin films were deposited using a magnetron sputtering system with an AZO target (with 3wt% Al2O3) on polyethylene terephthalate (PET) substrates with pre-strain. The effect of sputtering power on the optical and electrical properties of AZO films was investigated. For samples deposited on pre-strained PET substrates, X-ray diffraction was used to determine the c-axis orientation of AZO films deposited at 60, 80, and 100 W. Results show that resistivity decreased with increasing sputtering power, which might result from the better crystalline structure and fewer grain boundaries obtained at high power. The transmittance increased when the power was increased from 60 to 100 W. The absorption edge thus decreased for AZO film deposited at 100 W.

Original languageEnglish
Title of host publicationAdvanced Manufacturing Focusing on Multi-Disciplinary Technologies
Pages118-123
Number of pages6
DOIs
Publication statusPublished - 2012 Nov 26
Event4th International Conference on Advanced Manufacturing, ICAM 2012 - Jiaoxi, Taiwan
Duration: 2012 Mar 42012 Mar 8

Publication series

NameAdvanced Materials Research
Volume579
ISSN (Print)1022-6680

Other

Other4th International Conference on Advanced Manufacturing, ICAM 2012
CountryTaiwan
CityJiaoxi
Period12-03-0412-03-08

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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  • Cite this

    Hsieh, P. T., Li, T. C., Chung, C. J., Peng, H. S., & Lin, J. F. (2012). Effects of sputtering power on optical and electrical properties of al-doped ZnO thin film on flexible substrates. In Advanced Manufacturing Focusing on Multi-Disciplinary Technologies (pp. 118-123). (Advanced Materials Research; Vol. 579). https://doi.org/10.4028/www.scientific.net/AMR.579.118