Effects of surface treatment and annealing on properties of InN layers grown using metal organic chemical vapor deposition

Sheng-Po Chang, Kuan-Jen Chen, Po Jui Kuo, Yu Zung Chiou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report the effects surface treatment and annealing had on the properties of InN layers grown using metal organic chemical vapor deposition (MOCVD). The number of defects due to N vacancies decreased significantly with increasing annealing temperature. However, when the annealing temperature reached 700°C, the crystalline grain became larger on the film surfaces. Annealing at an appropriate temperature improved the crystalline quality and the electrical properties of the InN films. However, when the annealing temperature was too high, InN oxidized and even dissociated.

Original languageEnglish
Title of host publicationFrontiers of Manufacturing and Design Science III
Pages190-196
Number of pages7
EditionPART 1
DOIs
Publication statusPublished - 2013 Jan 24
Event3rd International Conference on Frontiers of Manufacturing and Design Science, ICFMD 2012 - , Hong Kong
Duration: 2012 Dec 112012 Dec 13

Publication series

NameApplied Mechanics and Materials
NumberPART 1
Volume271
ISSN (Print)1660-9336
ISSN (Electronic)1662-7482

Other

Other3rd International Conference on Frontiers of Manufacturing and Design Science, ICFMD 2012
CountryHong Kong
Period12-12-1112-12-13

Fingerprint

Organic chemicals
Surface treatment
Chemical vapor deposition
Annealing
Metals
Crystalline materials
Temperature
Vacancies
Electric properties
Defects

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Chang, S-P., Chen, K-J., Kuo, P. J., & Chiou, Y. Z. (2013). Effects of surface treatment and annealing on properties of InN layers grown using metal organic chemical vapor deposition. In Frontiers of Manufacturing and Design Science III (PART 1 ed., pp. 190-196). (Applied Mechanics and Materials; Vol. 271, No. PART 1). https://doi.org/10.4028/www.scientific.net/AMM.271-272.190
Chang, Sheng-Po ; Chen, Kuan-Jen ; Kuo, Po Jui ; Chiou, Yu Zung. / Effects of surface treatment and annealing on properties of InN layers grown using metal organic chemical vapor deposition. Frontiers of Manufacturing and Design Science III. PART 1. ed. 2013. pp. 190-196 (Applied Mechanics and Materials; PART 1).
@inproceedings{56f8543d583341a6962b78eae60f9212,
title = "Effects of surface treatment and annealing on properties of InN layers grown using metal organic chemical vapor deposition",
abstract = "We report the effects surface treatment and annealing had on the properties of InN layers grown using metal organic chemical vapor deposition (MOCVD). The number of defects due to N vacancies decreased significantly with increasing annealing temperature. However, when the annealing temperature reached 700°C, the crystalline grain became larger on the film surfaces. Annealing at an appropriate temperature improved the crystalline quality and the electrical properties of the InN films. However, when the annealing temperature was too high, InN oxidized and even dissociated.",
author = "Sheng-Po Chang and Kuan-Jen Chen and Kuo, {Po Jui} and Chiou, {Yu Zung}",
year = "2013",
month = "1",
day = "24",
doi = "10.4028/www.scientific.net/AMM.271-272.190",
language = "English",
isbn = "9783037855782",
series = "Applied Mechanics and Materials",
number = "PART 1",
pages = "190--196",
booktitle = "Frontiers of Manufacturing and Design Science III",
edition = "PART 1",

}

Chang, S-P, Chen, K-J, Kuo, PJ & Chiou, YZ 2013, Effects of surface treatment and annealing on properties of InN layers grown using metal organic chemical vapor deposition. in Frontiers of Manufacturing and Design Science III. PART 1 edn, Applied Mechanics and Materials, no. PART 1, vol. 271, pp. 190-196, 3rd International Conference on Frontiers of Manufacturing and Design Science, ICFMD 2012, Hong Kong, 12-12-11. https://doi.org/10.4028/www.scientific.net/AMM.271-272.190

Effects of surface treatment and annealing on properties of InN layers grown using metal organic chemical vapor deposition. / Chang, Sheng-Po; Chen, Kuan-Jen; Kuo, Po Jui; Chiou, Yu Zung.

Frontiers of Manufacturing and Design Science III. PART 1. ed. 2013. p. 190-196 (Applied Mechanics and Materials; Vol. 271, No. PART 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Effects of surface treatment and annealing on properties of InN layers grown using metal organic chemical vapor deposition

AU - Chang, Sheng-Po

AU - Chen, Kuan-Jen

AU - Kuo, Po Jui

AU - Chiou, Yu Zung

PY - 2013/1/24

Y1 - 2013/1/24

N2 - We report the effects surface treatment and annealing had on the properties of InN layers grown using metal organic chemical vapor deposition (MOCVD). The number of defects due to N vacancies decreased significantly with increasing annealing temperature. However, when the annealing temperature reached 700°C, the crystalline grain became larger on the film surfaces. Annealing at an appropriate temperature improved the crystalline quality and the electrical properties of the InN films. However, when the annealing temperature was too high, InN oxidized and even dissociated.

AB - We report the effects surface treatment and annealing had on the properties of InN layers grown using metal organic chemical vapor deposition (MOCVD). The number of defects due to N vacancies decreased significantly with increasing annealing temperature. However, when the annealing temperature reached 700°C, the crystalline grain became larger on the film surfaces. Annealing at an appropriate temperature improved the crystalline quality and the electrical properties of the InN films. However, when the annealing temperature was too high, InN oxidized and even dissociated.

UR - http://www.scopus.com/inward/record.url?scp=84872519528&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84872519528&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/AMM.271-272.190

DO - 10.4028/www.scientific.net/AMM.271-272.190

M3 - Conference contribution

AN - SCOPUS:84872519528

SN - 9783037855782

T3 - Applied Mechanics and Materials

SP - 190

EP - 196

BT - Frontiers of Manufacturing and Design Science III

ER -

Chang S-P, Chen K-J, Kuo PJ, Chiou YZ. Effects of surface treatment and annealing on properties of InN layers grown using metal organic chemical vapor deposition. In Frontiers of Manufacturing and Design Science III. PART 1 ed. 2013. p. 190-196. (Applied Mechanics and Materials; PART 1). https://doi.org/10.4028/www.scientific.net/AMM.271-272.190