Effects of temperature on niobium-doped MgZnO films grown using radio-frequency magnetron sputtering

Kuang Po Hsueh, Chao Yung Huang, Hsien Chin Chiu, Jinn-Kong Sheu, Yu Hsiang Yeh

Research output: Contribution to journalArticle

Abstract

Niobium-doped MgxZn1-xO (Nb-MZO) mixed oxide films with high transmittance were successfully deposited on sapphire substrates through radio-frequency (RF)magnetron sputtering using a 4-in ZnO/MgO/NbOx (75/20/5 wt%) target. In this study, the films were analyzed using Hall measurements, X-ray diffraction (XRD), transparent performance measurements, and X-ray photoelectron spectroscopy (XPS). XRD results showed two peaks: MgO2 (002)-wurtzite and MgxZn1-xO (111)-cubic peaks. The Nb-MZO films exhibited high transparency, with transmittance exceeding 90% in the visible region and a sharp absorption edge in the ultraviolet (UV) region, implying that the MgO content in the Nb-MZO layer increased the bandgaps. These results indicate that Nb-MZO films are ideal for use as transparent contact layers in near-UV light-emitting diodes. Hall measurements and XPS results successfully demonstrated the p-type conductivity of the Nb-MZO films because of the composition of the N-Nb binding caused by annealing in nitrogen atmosphere.

Original languageEnglish
Pages (from-to)Q96-Q100
JournalECS Journal of Solid State Science and Technology
Volume4
Issue number8
DOIs
Publication statusPublished - 2015 Jan 1

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Niobium
Magnetron sputtering
X ray photoelectron spectroscopy
Temperature
X ray diffraction
Aluminum Oxide
Sapphire
Transparency
Oxide films
Light emitting diodes
Energy gap
Nitrogen
Annealing
Substrates
Chemical analysis

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

Cite this

Hsueh, Kuang Po ; Huang, Chao Yung ; Chiu, Hsien Chin ; Sheu, Jinn-Kong ; Yeh, Yu Hsiang. / Effects of temperature on niobium-doped MgZnO films grown using radio-frequency magnetron sputtering. In: ECS Journal of Solid State Science and Technology. 2015 ; Vol. 4, No. 8. pp. Q96-Q100.
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abstract = "Niobium-doped MgxZn1-xO (Nb-MZO) mixed oxide films with high transmittance were successfully deposited on sapphire substrates through radio-frequency (RF)magnetron sputtering using a 4-in ZnO/MgO/NbOx (75/20/5 wt{\%}) target. In this study, the films were analyzed using Hall measurements, X-ray diffraction (XRD), transparent performance measurements, and X-ray photoelectron spectroscopy (XPS). XRD results showed two peaks: MgO2 (002)-wurtzite and MgxZn1-xO (111)-cubic peaks. The Nb-MZO films exhibited high transparency, with transmittance exceeding 90{\%} in the visible region and a sharp absorption edge in the ultraviolet (UV) region, implying that the MgO content in the Nb-MZO layer increased the bandgaps. These results indicate that Nb-MZO films are ideal for use as transparent contact layers in near-UV light-emitting diodes. Hall measurements and XPS results successfully demonstrated the p-type conductivity of the Nb-MZO films because of the composition of the N-Nb binding caused by annealing in nitrogen atmosphere.",
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Effects of temperature on niobium-doped MgZnO films grown using radio-frequency magnetron sputtering. / Hsueh, Kuang Po; Huang, Chao Yung; Chiu, Hsien Chin; Sheu, Jinn-Kong; Yeh, Yu Hsiang.

In: ECS Journal of Solid State Science and Technology, Vol. 4, No. 8, 01.01.2015, p. Q96-Q100.

Research output: Contribution to journalArticle

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