Effects of the annealing environment on green luminescence of ZnO thin films

Po Tsung Hsieh, Huai Shan Chin, Ping Kuan Chang, Chih Ming Wang, Ying Chung Chen, Mau Phon Houng

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)


The effects on visible light emission of ZnO thin films annealed by various annealing conditions were investigated. Based on the photoluminescence (PL) properties, stronger green light emission of ZnO thin films was obtained as annealing in oxygen than in other atmospheres. The green light emission increased in intensity with the increased annealing temperature and the strongest green light emission stood at the temperature of 800 °C. According to the structural analyses, ZnO films show a preferred (0 0 2) orientation peak and the crystalline became better through annealing process. The surface morphologies became closer to the hexagonal shape and also became denser as annealing in oxygen. Mechanism analysis of PL shows that green emission band should be derived from the defects, which is greatly related to oxygen concentration during annealing, formed in ZnO films. The relationship between green luminescence and oxygen concentration in ZnO thin films was discussed.

Original languageEnglish
Pages (from-to)2526-2529
Number of pages4
JournalPhysica B: Condensed Matter
Issue number11
Publication statusPublished - 2010 Jun 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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