Effects of the inclination angle of polyethylene terephthalate substrate on mechanical, electrical, and optical properties of Al-doped ZnO coating film

Tse Chang Li, Jen Fin Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A flat plate in the deposition stage is designed to be tilted flexibly to form an inclination angle between an ion beam and the direction normal to a polyethylene terephthalate (PET) substrate. Five kinds of PET/aluminum-doped zinc oxide specimen were prepared to examine the effects of inclination angle on the mechanical, electrical, optical properties. The relative intensity ratio (χ1) and d-spacing values both decrease with increasing inclination angle; the reductions of these two parameters result in an increase in the residual stress. The variation of energy gap with inclination angle is the same as that shown by the carrier concentration, and exactly opposite to those of resistivity and carrier mobility.

Original languageEnglish
Title of host publicationProceedings of AM-FPD 2014 - The 21st International Workshop on Active-Matrix Flatpanel Displays and Devices
Subtitle of host publicationTFT Technologies and FPD Materials
PublisherIEEE Computer Society
Pages195-198
Number of pages4
ISBN (Print)9784863483958
DOIs
Publication statusPublished - 2014 Jan 1
Event21st International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2014 - Kyoto, Japan
Duration: 2014 Jul 22014 Jul 4

Publication series

NameProceedings of AM-FPD 2014 - The 21st International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials

Other

Other21st International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2014
CountryJapan
CityKyoto
Period14-07-0214-07-04

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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