Effects on RF Performance for AlGaN/GaN HEMT on Si Substrate with AlGaN Buffer Engineering

You Chen Weng, Heng Tung Hsu, Yi Fan Tsao, Debashis Panda, Hsuan Yao Huang, Min Lu Kao, Yu Pin Lan, Edward Yi Chang, Ching Ting Lee

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

In this paper, we demonstrate the AlGaN/GaN high electron mobility transistors (HEMTs) on Si substrate using an AlGaN back-barrier (BB) and super-lattice (SL) buffer to achieve high breakdown and low current collapse (CC) properties for Radio-frequency (RF) applications. The HEMTs also demonstrated low initial vertical leakage current, high thermal stability, and smaller drain-lag with reduced leakage currents as compared to the devices using step-graded (SG) AlGaN buffer. Also, the device showed improved RF performances with higher f T and f max as compared to the devices with SG buffer.

Original languageEnglish
Article number035002
JournalECS Journal of Solid State Science and Technology
Volume12
Issue number3
DOIs
Publication statusPublished - 2023 Mar

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

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