Elaboration, structural characterization and optical properties of the yttrium alkoxide derived Y2O3 planar optical waveguides

Yu-chun Wu, S. Parola, O. Marty, J. Mugnier

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17 Citations (Scopus)


Y2O3 optical planar waveguides are fabricated by the sol-gel method and the dip-coating technique. High purity yttrium alkoxide (yttrium 2-methoxyethoxide) is used as starting material for the Y 2O3 sol and acetylacetone is added to improve the stability of the sol. Highly concentrated sol up to 0.8 M is prepared and six stacked layers are enough to support four propagation modes at wavelength from 488 to 632.8 nm. The cubic phase of Y2O3 is crystallized after an annealing treatment at 700 °C. X-ray diffraction is conducted on the films for their structural analysis. Optical properties of the waveguides are determined by multi-wavelength m-lines spectroscopy and attenuation coefficient measurement. The attenuation coefficient of the prepared Y 2O3 waveguiding thin films is in the range between 1 and 2 dB/cm at 632.8 nm.

Original languageEnglish
Pages (from-to)21-27
Number of pages7
JournalOptical Materials
Issue number1
Publication statusPublished - 2004 Jan 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Computer Science(all)
  • Atomic and Molecular Physics, and Optics
  • Spectroscopy
  • Physical and Theoretical Chemistry
  • Organic Chemistry
  • Inorganic Chemistry
  • Electrical and Electronic Engineering

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