Electrical contacts of metals to carbon-nanotubes for applications to electrical coupling between miniaturized moving parts and sensors

Y. Tzeng, Y. Chen, C. Liu, V. Krishnardula

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Aligned carbon nanotubes were grown on electrodes by means of thermal chemical vapor deposition in mixtures of argon and acetylene using iron catalyst. These flexible, strong, and electrically conductive carbon nanotubes were used to couple electrical current between movable electrodes. Electrical contact resistance as a function of current loading, contact orientation, and distance between counter electrodes was measured. Methods of fabricating the carbon nanotube coated electrodes and potential applications to electrical coupling for moving parts in Micro-Electro-Mechanical Systems (MEMS), position sensitive sensors, and pressure sensors are discussed.

Original languageEnglish
Title of host publication2004 4th IEEE Conference on Nanotechnology
Pages495-497
Number of pages3
Publication statusPublished - 2004
Event2004 4th IEEE Conference on Nanotechnology - Munich, Germany
Duration: 2004 Aug 162004 Aug 19

Publication series

Name2004 4th IEEE Conference on Nanotechnology

Other

Other2004 4th IEEE Conference on Nanotechnology
CountryGermany
CityMunich
Period04-08-1604-08-19

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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