Abstract
A detection method based on electrical analysis for valveless peristaltic lead zirconate titanate (PZT) micropump fabrication is proposed. The modified Butterworth-Van Dyke (BVD) model is used to analyze the properties of resistant or capacitive elements related to various failures. The series resistance and parallel capacitance in the BVD model are used to detect faults and classify the failure type. The failure analysis of the micropump assembly process focuses on the three common failures: (a) PZT cracking, (b) uneven silver epoxy distribution, and (c) PZT inversion. The analysis approach combines experimental results with a circuit model to determine PZT micropump fabrication reliability. It can be used to detect defects in peristaltic PZT micropumps and classify failure type.
| Original language | English |
|---|---|
| Pages (from-to) | 1080-1085 |
| Number of pages | 6 |
| Journal | Microelectronics Reliability |
| Volume | 52 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 2012 Jun 1 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Safety, Risk, Reliability and Quality
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
Cite this
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Electrical failure analysis of peristaltic micropumps fabricated with PZT actuators. / Chen, Bing Liang; Huang, Pao Cheng; Jang, Ling-Sheng; Chen, Ming Kun.
In: Microelectronics Reliability, Vol. 52, No. 6, 01.06.2012, p. 1080-1085.Research output: Contribution to journal › Article
TY - JOUR
T1 - Electrical failure analysis of peristaltic micropumps fabricated with PZT actuators
AU - Chen, Bing Liang
AU - Huang, Pao Cheng
AU - Jang, Ling-Sheng
AU - Chen, Ming Kun
PY - 2012/6/1
Y1 - 2012/6/1
N2 - A detection method based on electrical analysis for valveless peristaltic lead zirconate titanate (PZT) micropump fabrication is proposed. The modified Butterworth-Van Dyke (BVD) model is used to analyze the properties of resistant or capacitive elements related to various failures. The series resistance and parallel capacitance in the BVD model are used to detect faults and classify the failure type. The failure analysis of the micropump assembly process focuses on the three common failures: (a) PZT cracking, (b) uneven silver epoxy distribution, and (c) PZT inversion. The analysis approach combines experimental results with a circuit model to determine PZT micropump fabrication reliability. It can be used to detect defects in peristaltic PZT micropumps and classify failure type.
AB - A detection method based on electrical analysis for valveless peristaltic lead zirconate titanate (PZT) micropump fabrication is proposed. The modified Butterworth-Van Dyke (BVD) model is used to analyze the properties of resistant or capacitive elements related to various failures. The series resistance and parallel capacitance in the BVD model are used to detect faults and classify the failure type. The failure analysis of the micropump assembly process focuses on the three common failures: (a) PZT cracking, (b) uneven silver epoxy distribution, and (c) PZT inversion. The analysis approach combines experimental results with a circuit model to determine PZT micropump fabrication reliability. It can be used to detect defects in peristaltic PZT micropumps and classify failure type.
UR - http://www.scopus.com/inward/record.url?scp=84862779932&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84862779932&partnerID=8YFLogxK
U2 - 10.1016/j.microrel.2012.01.004
DO - 10.1016/j.microrel.2012.01.004
M3 - Article
VL - 52
SP - 1080
EP - 1085
JO - Microelectronics Reliability
JF - Microelectronics Reliability
SN - 0026-2714
IS - 6
ER -