Electromagnetic actuator utilizing magnetic film of electroplated alloy and its application to valveless pumps

Pin Hsien Chiu, Ruey Jen Yang, Chia Yen Lee, Lung Ming Fu

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


A novel technique for the fabrication of electromagnetic micro actuators and micro pumps is proposed. The actuator is composed of a diaphragm, micro-coils, and a magnet. When an electrical current is applied to the micro-coils, the magnetic force produced between the magnet and the coil causes the diaphragm to deflect, which is the source of actuation. Photo-lithography, electron beam evaporation, and electroplating are used in the fabrication process. The actuating device uses polydimethylsiloxane (PDMS) for the vibrating diaphragm, polyimide (PI) for the insulating layer, and electroplated copper for the coil. The diaphragm deflection can be regulated by varying the current passed through the micro-coil. Three types of micro-coil are presented, namely those with a 150-μm line width and a 150-μm spacing, a 125-μm line width and a 150-μm spacing, and a 100- μm line width and a 125-μm spacing. The proposed micro actuator has a maximum displacement of 81.33 μm. The experimental results indicate a maximum flow rate of 0.52 nL/min with a driving frequency of 200 Hz and an applied voltage of 1.5 V.

Original languageEnglish
Pages (from-to)244-248
Number of pages5
JournalAdvanced Science Letters
Issue number1
Publication statusPublished - 2012 Jul 1

All Science Journal Classification (ASJC) codes

  • Computer Science(all)
  • Health(social science)
  • Mathematics(all)
  • Education
  • Environmental Science(all)
  • Engineering(all)
  • Energy(all)


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