Electromagnetic optical switch for optical network communication was presented. The switch consisted of planar coil with high aspect ratio, design of micromagnetic circuit, and Ni/Fe permalloy by microelectroplating. The device actuated by passing a current of sufficient magnitude generated a magnetic field which switched on the microactuator. The process eliminated the problems of etching selectivity and residual stress problems and provided two times larger force output than conventional magnetic microactuators.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics