Electromagnetic optical switch for optical network communication

Cheng Tang Pan; Sheng Chih Shen; His Harng Yang; Min Chieh Chou; Shinn Tyan Wu

doi:10.1117/12.445100

Electromagnetic optical switch for optical network communication

Cheng Tang Pan, Sheng Chih Shen, His Harng Yang, Min Chieh Chou, Shinn Tyan Wu

Department of Systems and Naval Mechatronic Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

The electromagnetic optical switch combines with Ni/Fe permalloy magnetic circuit design, high aspect ratio microstructure electroplating, bulk micromachining, excimer laser ablation and low temperature wafer bonding. The result shows it can output force 68mN, deflection angle can reach 82° only with 4820A/m, frequency can reach 2kHz, and bonding strength can be larger than 216 kg/cm².

Original language	English
Pages (from-to)	240-246
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4582
DOIs	https://doi.org/10.1117/12.445100
Publication status	Published - 2001
Event	Optical Switching and Optical Interconnection - Beijing, China Duration: 2001 Nov 12 → 2001 Nov 15

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.445100

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title = "Electromagnetic optical switch for optical network communication",

abstract = "The electromagnetic optical switch combines with Ni/Fe permalloy magnetic circuit design, high aspect ratio microstructure electroplating, bulk micromachining, excimer laser ablation and low temperature wafer bonding. The result shows it can output force 68mN, deflection angle can reach 82° only with 4820A/m, frequency can reach 2kHz, and bonding strength can be larger than 216 kg/cm2.",

author = "Pan, {Cheng Tang} and Shen, {Sheng Chih} and Yang, {His Harng} and Chou, {Min Chieh} and Wu, {Shinn Tyan}",

year = "2001",

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language = "English",

volume = "4582",

pages = "240--246",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Optical Switching and Optical Interconnection ; Conference date: 12-11-2001 Through 15-11-2001",

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T1 - Electromagnetic optical switch for optical network communication

AU - Pan, Cheng Tang

AU - Shen, Sheng Chih

AU - Yang, His Harng

AU - Chou, Min Chieh

AU - Wu, Shinn Tyan

PY - 2001

Y1 - 2001

N2 - The electromagnetic optical switch combines with Ni/Fe permalloy magnetic circuit design, high aspect ratio microstructure electroplating, bulk micromachining, excimer laser ablation and low temperature wafer bonding. The result shows it can output force 68mN, deflection angle can reach 82° only with 4820A/m, frequency can reach 2kHz, and bonding strength can be larger than 216 kg/cm2.

AB - The electromagnetic optical switch combines with Ni/Fe permalloy magnetic circuit design, high aspect ratio microstructure electroplating, bulk micromachining, excimer laser ablation and low temperature wafer bonding. The result shows it can output force 68mN, deflection angle can reach 82° only with 4820A/m, frequency can reach 2kHz, and bonding strength can be larger than 216 kg/cm2.

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DO - 10.1117/12.445100

M3 - Conference article

AN - SCOPUS:0035776018

SN - 0277-786X

VL - 4582

SP - 240

EP - 246

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Optical Switching and Optical Interconnection

Y2 - 12 November 2001 through 15 November 2001

ER -

Electromagnetic optical switch for optical network communication

Abstract

All Science Journal Classification (ASJC) codes

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