Electromagnetic optical switch for optical network communication

Cheng Tang Pan, Sheng Chih Shen, His Harng Yang, Min Chieh Chou, Shinn Tyan Wu

Research output: Contribution to journalConference articlepeer-review


The electromagnetic optical switch combines with Ni/Fe permalloy magnetic circuit design, high aspect ratio microstructure electroplating, bulk micromachining, excimer laser ablation and low temperature wafer bonding. The result shows it can output force 68mN, deflection angle can reach 82° only with 4820A/m, frequency can reach 2kHz, and bonding strength can be larger than 216 kg/cm2.

Original languageEnglish
Pages (from-to)240-246
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2001
EventOptical Switching and Optical Interconnection - Beijing, China
Duration: 2001 Nov 122001 Nov 15

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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