Electromechanical analysis of a piezoelectric beam used to drive a torsional microactuator

Jin H. Huang, Jhao Ming Chen, Y. C. Shiah

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


The present paper is to analyze the electromechanical responses of a piezoelectric beam in a novel torsional microactuator designed for digital micromirror devices. With the capability of self-detecting rotating angles, the microactuator is designed to actuate high rotating angles when applied with a low voltage. Having laid the design foundation of such devices for the industry, the present work analyzes the electromechanical response of the piezoelectric beam used to drive the micromirror. An analytical expression for the axial deformation of a PZT-4 cantilever beam in response to an applied voltage is presented in this article. Also, numerical investigations are conducted to study the effect of the beam's length and thickness on its axial deformation.

Original languageEnglish
Pages (from-to)543-553
Number of pages11
JournalJournal of Intelligent Material Systems and Structures
Issue number6
Publication statusPublished - 2007 Jun

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Electromechanical analysis of a piezoelectric beam used to drive a torsional microactuator'. Together they form a unique fingerprint.

Cite this