Electromechanical analysis of a piezoelectric beam used to drive a torsional microactuator

Jin H. Huang, Jhao Ming Chen, Yui-Chuin Shiah

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The present paper is to analyze the electromechanical responses of a piezoelectric beam in a novel torsional microactuator designed for digital micromirror devices. With the capability of self-detecting rotating angles, the microactuator is designed to actuate high rotating angles when applied with a low voltage. Having laid the design foundation of such devices for the industry, the present work analyzes the electromechanical response of the piezoelectric beam used to drive the micromirror. An analytical expression for the axial deformation of a PZT-4 cantilever beam in response to an applied voltage is presented in this article. Also, numerical investigations are conducted to study the effect of the beam's length and thickness on its axial deformation.

Original languageEnglish
Pages (from-to)543-553
Number of pages11
JournalJournal of Intelligent Material Systems and Structures
Volume18
Issue number6
DOIs
Publication statusPublished - 2007 Jun 1

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Microactuators
Digital devices
Cantilever beams
Electric potential
Industry

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanical Engineering

Cite this

@article{bbc07479aeeb44a1b463018083bce2f2,
title = "Electromechanical analysis of a piezoelectric beam used to drive a torsional microactuator",
abstract = "The present paper is to analyze the electromechanical responses of a piezoelectric beam in a novel torsional microactuator designed for digital micromirror devices. With the capability of self-detecting rotating angles, the microactuator is designed to actuate high rotating angles when applied with a low voltage. Having laid the design foundation of such devices for the industry, the present work analyzes the electromechanical response of the piezoelectric beam used to drive the micromirror. An analytical expression for the axial deformation of a PZT-4 cantilever beam in response to an applied voltage is presented in this article. Also, numerical investigations are conducted to study the effect of the beam's length and thickness on its axial deformation.",
author = "Huang, {Jin H.} and Chen, {Jhao Ming} and Yui-Chuin Shiah",
year = "2007",
month = "6",
day = "1",
doi = "10.1177/1045389X06067294",
language = "English",
volume = "18",
pages = "543--553",
journal = "Journal of Intelligent Material Systems and Structures",
issn = "1045-389X",
publisher = "SAGE Publications Ltd",
number = "6",

}

Electromechanical analysis of a piezoelectric beam used to drive a torsional microactuator. / Huang, Jin H.; Chen, Jhao Ming; Shiah, Yui-Chuin.

In: Journal of Intelligent Material Systems and Structures, Vol. 18, No. 6, 01.06.2007, p. 543-553.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Electromechanical analysis of a piezoelectric beam used to drive a torsional microactuator

AU - Huang, Jin H.

AU - Chen, Jhao Ming

AU - Shiah, Yui-Chuin

PY - 2007/6/1

Y1 - 2007/6/1

N2 - The present paper is to analyze the electromechanical responses of a piezoelectric beam in a novel torsional microactuator designed for digital micromirror devices. With the capability of self-detecting rotating angles, the microactuator is designed to actuate high rotating angles when applied with a low voltage. Having laid the design foundation of such devices for the industry, the present work analyzes the electromechanical response of the piezoelectric beam used to drive the micromirror. An analytical expression for the axial deformation of a PZT-4 cantilever beam in response to an applied voltage is presented in this article. Also, numerical investigations are conducted to study the effect of the beam's length and thickness on its axial deformation.

AB - The present paper is to analyze the electromechanical responses of a piezoelectric beam in a novel torsional microactuator designed for digital micromirror devices. With the capability of self-detecting rotating angles, the microactuator is designed to actuate high rotating angles when applied with a low voltage. Having laid the design foundation of such devices for the industry, the present work analyzes the electromechanical response of the piezoelectric beam used to drive the micromirror. An analytical expression for the axial deformation of a PZT-4 cantilever beam in response to an applied voltage is presented in this article. Also, numerical investigations are conducted to study the effect of the beam's length and thickness on its axial deformation.

UR - http://www.scopus.com/inward/record.url?scp=34249098364&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34249098364&partnerID=8YFLogxK

U2 - 10.1177/1045389X06067294

DO - 10.1177/1045389X06067294

M3 - Article

VL - 18

SP - 543

EP - 553

JO - Journal of Intelligent Material Systems and Structures

JF - Journal of Intelligent Material Systems and Structures

SN - 1045-389X

IS - 6

ER -