Electromechanical coupling characteristics of MEMS micro cantilevers with applications

Kuang Shun Ou, Kuo Shen Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this work, the electromechanical coupling behavior such as pull-in characteristics and dynamic responses of MEMS cantilevers has been investigated. In particular, this work addressed the three interrelated issues: first, The speedenergy-impact relationship of generalized electrostatic actuated MEMS by constructing a SIMULINK model, second, the pull-in voltage of micro cantilevers with the existence of both stress gradients and fringing effects was found, and finally, the development of command shaping approach for reducing the vibration or impact minimization of electrostatic actuation for enhancing the device longevity while maintaining the device performance. Throughout these three inter-related problems, it is possible to develop integrated dynamics for future applications whatever in performance enhancement or in improving the structural reliability of electrostatic actuated MEMS devices.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015
EditorsGerold Schropfer, Francis Pressecq, Marta Rencz, Peter Schneider, Yoshio Mita, Benoit Charlot, Pascal Nouet
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479986255
DOIs
Publication statusPublished - 2015 Jul 16
Event17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 - Montpellier, France
Duration: 2015 Apr 272015 Apr 30

Publication series

NameSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015

Other

Other17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015
CountryFrance
CityMontpellier
Period15-04-2715-04-30

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Electrical and Electronic Engineering

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  • Cite this

    Ou, K. S., & Chen, K. S. (2015). Electromechanical coupling characteristics of MEMS micro cantilevers with applications. In G. Schropfer, F. Pressecq, M. Rencz, P. Schneider, Y. Mita, B. Charlot, & P. Nouet (Eds.), Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 [7161008] (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DTIP.2015.7161008