Electron backscatter diffraction analysis on the microstructures of electrolytic Cu deposition in the through hole filling process

C. E. Ho, C. W. Liao, C. X. Pan, H. J. Chen, J. C. Kuo, D. Chen

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

Through hole (TH) filling by electrolytic Cu deposition has become a critical process for high density interconnection technologies associated with three-dimensional packaging. In this study, the morphological and crystallographic evolutions of the electrolytic Cu TH filling with the plating time (t) were investigated using an optical microscope and a field-emission scanning electron microscope equipped with an electron backscatter diffraction (EBSD) analysis system. The Cu deposition rate in the TH was strongly dependent on t, which was established at a moderate rate of ∼0.3 μm/min at t = 40 min-74 min, then dramatically accelerated to ∼4 μm/min at t = 74 min-80 min (termed "fast deposition regime"), and subsequently decelerated in the final plating regime (t = 80 min-100 min). EBSD analyses showed that the electrolytic Cu predominantly possessed high-angle grain boundaries with strong coincidence site lattices atΣ3 (60° rotation at b111>) andΣ9 (38.9° rotation at b101>) for all t examined. Interestingly, the [111]TD (transverse direction) orientation displayed a relatively strong presence in the initial induction regime, while the [111]TD + [101] TD orientations with large grain sizes became dominant in the fast deposition regime (i.e., t = 74 min-80 min), and there was a very low concentration of the [111]TD orientation in the final deposition regime. This research offered a better understanding of the morphological and crystallographic evolutions in each stage of the electrolytic Cu TH filling.

Original languageEnglish
Pages (from-to)412-418
Number of pages7
JournalThin Solid Films
Volume544
DOIs
Publication statusPublished - 2013 Oct 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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