Original language | English |
---|---|
Pages (from-to) | 1216-1223 |
Number of pages | 8 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 21 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2003 Jul 1 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering