Electron heating in inductively coupled discharges

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

An analytic expression for the surface impedance for electron heating in inductively coupled discharges is derived from the kinetic equation with the optimum ordering that ν∼ω. Here, ν is the electron collision frequency, and ω is the frequency of the driven current inside the antenna coil. The expression is valid for both collisional and collisionless discharges, and can be employed in the modeling of the source.

Original languageEnglish
Pages (from-to)3300-3303
Number of pages4
JournalPhysics of Plasmas
Volume3
Issue number9
DOIs
Publication statusPublished - 1996 Jan 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

Fingerprint Dive into the research topics of 'Electron heating in inductively coupled discharges'. Together they form a unique fingerprint.

Cite this