An analytic expression for the surface impedance for electron heating in inductively coupled discharges is derived from the kinetic equation with the optimum ordering that ν∼ω. Here, ν is the electron collision frequency, and ω is the frequency of the driven current inside the antenna coil. The expression is valid for both collisional and collisionless discharges, and can be employed in the modeling of the source.
|Number of pages||4|
|Journal||Physics of Plasmas|
|Publication status||Published - 1996|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics