Electron heating in inductively coupled discharges

K. C. Shaing

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)


An analytic expression for the surface impedance for electron heating in inductively coupled discharges is derived from the kinetic equation with the optimum ordering that ν∼ω. Here, ν is the electron collision frequency, and ω is the frequency of the driven current inside the antenna coil. The expression is valid for both collisional and collisionless discharges, and can be employed in the modeling of the source.

Original languageEnglish
Pages (from-to)3300-3303
Number of pages4
JournalPhysics of Plasmas
Issue number9
Publication statusPublished - 1996

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics


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