Electron heating in inductively coupled discharges

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

An analytic expression for the surface impedance for electron heating in inductively coupled discharges is derived from the kinetic equation with the optimum ordering that ν∼ω. Here, ν is the electron collision frequency, and ω is the frequency of the driven current inside the antenna coil. The expression is valid for both collisional and collisionless discharges, and can be employed in the modeling of the source.

Original languageEnglish
Pages (from-to)3300-3303
Number of pages4
JournalPhysics of Plasmas
Volume3
Issue number9
DOIs
Publication statusPublished - 1996 Jan 1

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heating
kinetic equations
electron scattering
electrons
coils
antennas
impedance

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

Cite this

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abstract = "An analytic expression for the surface impedance for electron heating in inductively coupled discharges is derived from the kinetic equation with the optimum ordering that ν∼ω. Here, ν is the electron collision frequency, and ω is the frequency of the driven current inside the antenna coil. The expression is valid for both collisional and collisionless discharges, and can be employed in the modeling of the source.",
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Electron heating in inductively coupled discharges. / Shaing, Ker-Chung.

In: Physics of Plasmas, Vol. 3, No. 9, 01.01.1996, p. 3300-3303.

Research output: Contribution to journalArticle

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