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Electron heating in inductively coupled discharges
K. C. Shaing
Institute of Space and Plasma Sciences
Research output
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Contribution to journal
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Article
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peer-review
10
Citations (Scopus)
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Physics & Astronomy
heating
100%
kinetic equations
81%
electron scattering
70%
antennas
68%
electrons
67%
coils
65%
impedance
60%