Electronic and luminescence properties of sputter-deposited TiO2 nanostructures

Yu Ming Chang, Dillip K. Mishra, Jyh Ming Ting

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7 Citations (Scopus)


TiO2 nanostructures are synthesized here by a radiofrequency magnetron sputter deposition technique using tin as a catalyst. The catalyst seeding and the sputter deposition are performed at ambient temperature. The growth of TiO2 is carried out in a mixed Ar + O2 and Ar + N2 atmosphere and is found to comprise pure anatase. The morphologies of the obtained TiO2 nanostructures are characterized using scanning electron microscopy. The electronic structures are investigated by X-ray absorption near-edge structure spectroscopy. The chemical compositions are analyzed using X-ray photoelectron spectra analysis, which indicates the presence of Ti3+. The luminescence properties are examined using cathodoluminescence spectroscopy. Five peaks are resolved from the luminescence data, indicating emissions of oxygen vacancies, F, F+, band-to-band emission and self-trapped excitons on TiO6.

Original languageEnglish
Pages (from-to)7511-7519
Number of pages9
JournalActa Materialia
Issue number19
Publication statusPublished - 2013 Nov

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Polymers and Plastics
  • Metals and Alloys


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