TY - GEN
T1 - EMI Suppression of MEMS Honeycomb-Shaped Inductor on Oscillators for Wireless-Powered IC Design
AU - Wu, Hao Jiun
AU - Wang, Po Ming
AU - Huang, Tzuen Hsi
AU - Yang, Sheng Fan
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/6
Y1 - 2019/6
N2 - This paper shows the operation of honeycomb-shaped inductors with or without micro-electromechanical systems (MEMS) post-process in Ku-band and their application to VCOs in terms of circuit performances like crosstalk and injection pulling effects. The unique layout pattern of honeycomb-shaped inductor can provide almost omnidirectional electromagnetic interference (EMI) suppression to adjacent noise interferes. In this work, MEMS process is adopted to remove the silicon substrate for improving the inductor quality factor. The honeycomb-shaped inductors either with or without MEMS postprocess and the single-turn octagonal inductor are implemented to Ku-band VCOs operated at 17 GHz, respectively, with the same dc power consumption of 5.29 mW at VDD = 1.8 V, as an experimental set for comparison. The experiment results indicate that the honeycomb-shaped inductor exhibits better injection pulling mitigation than the single-turn octagonal inductor by more than 15 dB. This feature would be helpful to the design of wireless-powered sensor integrated circuits (ICs) with more EMI suppression capability in 5G communication environment.
AB - This paper shows the operation of honeycomb-shaped inductors with or without micro-electromechanical systems (MEMS) post-process in Ku-band and their application to VCOs in terms of circuit performances like crosstalk and injection pulling effects. The unique layout pattern of honeycomb-shaped inductor can provide almost omnidirectional electromagnetic interference (EMI) suppression to adjacent noise interferes. In this work, MEMS process is adopted to remove the silicon substrate for improving the inductor quality factor. The honeycomb-shaped inductors either with or without MEMS postprocess and the single-turn octagonal inductor are implemented to Ku-band VCOs operated at 17 GHz, respectively, with the same dc power consumption of 5.29 mW at VDD = 1.8 V, as an experimental set for comparison. The experiment results indicate that the honeycomb-shaped inductor exhibits better injection pulling mitigation than the single-turn octagonal inductor by more than 15 dB. This feature would be helpful to the design of wireless-powered sensor integrated circuits (ICs) with more EMI suppression capability in 5G communication environment.
UR - http://www.scopus.com/inward/record.url?scp=85083575867&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85083575867&partnerID=8YFLogxK
U2 - 10.1109/WPTC45513.2019.9055652
DO - 10.1109/WPTC45513.2019.9055652
M3 - Conference contribution
AN - SCOPUS:85083575867
T3 - 2019 IEEE Wireless Power Transfer Conference, WPTC 2019
SP - 565
EP - 568
BT - 2019 IEEE Wireless Power Transfer Conference, WPTC 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2019 IEEE Wireless Power Transfer Conference, WPTC 2019
Y2 - 18 June 2019 through 21 June 2019
ER -