@inproceedings{036fef73e0704f1280c2560a536c2a6d,
title = "Enabling high aspect ratio nano-hole metal filling by employing supercritical carbon dioxide electrochemical deposition",
author = "Tsai, {Wen Ta} and Yang, {Jun Jie} and Cheng, {Chi Lin}",
year = "2016",
doi = "10.11159/icnnfc16.119",
language = "English",
isbn = "9781927877197",
series = "World Congress on Recent Advances in Nanotechnology",
publisher = "Avestia Publishing",
booktitle = "Proceedings of the World Congress on Recent Advances in Nanotechnology, RAN 2016",
note = "Proceedings of the World Congress on Recent Advances in Nanotechnology, RAN 2016 ; Conference date: 01-04-2016 Through 02-04-2016",
}