Enhanced light output of GaN-based thin-film flip-chip light-emitting diodes by surface texturing using laser ablation and chemical etching

Tseng Hsing Lin; Shui Jinn Wang; Yung Chun Tu; Chien Hsiung Hung; Zong Sian You; Yu Hsueh Chin

doi:10.1109/DRC.2015.7175586

Enhanced light output of GaN-based thin-film flip-chip light-emitting diodes by surface texturing using laser ablation and chemical etching

Tseng Hsing Lin, Shui Jinn Wang, Yung Chun Tu, Chien Hsiung Hung, Zong Sian You, Yu Hsueh Chin

Institute of Microelectronics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

A surface texturing scheme using ablation etching by KrF excimer laser irradiation and chemical wet etching is demonstrated to improve the light-extraction efficiency of GaN-based thin-film flip-chip light-emitting diodes (TFFC-LED). Both simulated and experimental results on the light emission characteristics are presented and discussed. For the TFFC-LED (die size of 1×1 mm²) with the proposed surface roughening scheme, enhancements in light output power (LOP) by 13.08% (12.81%) and wall-plug efficiency (WPE) by 2.87% (2.25%) at 350 mA (700 mA) as compared with that of the TFFC-LED without surface texturing are achieved experimentally.

Original language	English
Title of host publication	73rd Annual Device Research Conference, DRC 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	123-124
Number of pages	2
ISBN (Electronic)	9781467381345
DOIs	https://doi.org/10.1109/DRC.2015.7175586
Publication status	Published - 2015 Aug 3
Event	73rd Annual Device Research Conference, DRC 2015 - Columbus, United States Duration: 2015 Jun 21 → 2015 Jun 24

Publication series

Name	Device Research Conference - Conference Digest, DRC
Volume	2015-August
ISSN (Print)	1548-3770

Other

Other	73rd Annual Device Research Conference, DRC 2015
Country/Territory	United States
City	Columbus
Period	15-06-21 → 15-06-24

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/DRC.2015.7175586

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Lin, T. H., Wang, S. J., Tu, Y. C., Hung, C. H., You, Z. S., & Chin, Y. H. (2015). Enhanced light output of GaN-based thin-film flip-chip light-emitting diodes by surface texturing using laser ablation and chemical etching. In 73rd Annual Device Research Conference, DRC 2015 (pp. 123-124). Article 7175586 (Device Research Conference - Conference Digest, DRC; Vol. 2015-August). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DRC.2015.7175586

Lin, Tseng Hsing ; Wang, Shui Jinn ; Tu, Yung Chun et al. / Enhanced light output of GaN-based thin-film flip-chip light-emitting diodes by surface texturing using laser ablation and chemical etching. 73rd Annual Device Research Conference, DRC 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 123-124 (Device Research Conference - Conference Digest, DRC).

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title = "Enhanced light output of GaN-based thin-film flip-chip light-emitting diodes by surface texturing using laser ablation and chemical etching",

abstract = "A surface texturing scheme using ablation etching by KrF excimer laser irradiation and chemical wet etching is demonstrated to improve the light-extraction efficiency of GaN-based thin-film flip-chip light-emitting diodes (TFFC-LED). Both simulated and experimental results on the light emission characteristics are presented and discussed. For the TFFC-LED (die size of 1×1 mm2) with the proposed surface roughening scheme, enhancements in light output power (LOP) by 13.08% (12.81%) and wall-plug efficiency (WPE) by 2.87% (2.25%) at 350 mA (700 mA) as compared with that of the TFFC-LED without surface texturing are achieved experimentally.",

author = "Lin, {Tseng Hsing} and Wang, {Shui Jinn} and Tu, {Yung Chun} and Hung, {Chien Hsiung} and You, {Zong Sian} and Chin, {Yu Hsueh}",

note = "Funding Information: This work was supported by the Ministry of Science and Technology (MOST), Republic of China (Taiwan), under grants MOST-103-2221-E-006-132 and NSC-102-2221-E-006-217-MY2.; 73rd Annual Device Research Conference, DRC 2015 ; Conference date: 21-06-2015 Through 24-06-2015",

year = "2015",

month = aug,

day = "3",

doi = "10.1109/DRC.2015.7175586",

language = "English",

series = "Device Research Conference - Conference Digest, DRC",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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Lin, TH, Wang, SJ, Tu, YC, Hung, CH, You, ZS & Chin, YH 2015, Enhanced light output of GaN-based thin-film flip-chip light-emitting diodes by surface texturing using laser ablation and chemical etching. in 73rd Annual Device Research Conference, DRC 2015., 7175586, Device Research Conference - Conference Digest, DRC, vol. 2015-August, Institute of Electrical and Electronics Engineers Inc., pp. 123-124, 73rd Annual Device Research Conference, DRC 2015, Columbus, United States, 15-06-21. https://doi.org/10.1109/DRC.2015.7175586

Enhanced light output of GaN-based thin-film flip-chip light-emitting diodes by surface texturing using laser ablation and chemical etching. / Lin, Tseng Hsing; Wang, Shui Jinn; Tu, Yung Chun et al.
73rd Annual Device Research Conference, DRC 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 123-124 7175586 (Device Research Conference - Conference Digest, DRC; Vol. 2015-August).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Enhanced light output of GaN-based thin-film flip-chip light-emitting diodes by surface texturing using laser ablation and chemical etching

AU - Lin, Tseng Hsing

AU - Wang, Shui Jinn

AU - Tu, Yung Chun

AU - Hung, Chien Hsiung

AU - You, Zong Sian

AU - Chin, Yu Hsueh

N1 - Funding Information: This work was supported by the Ministry of Science and Technology (MOST), Republic of China (Taiwan), under grants MOST-103-2221-E-006-132 and NSC-102-2221-E-006-217-MY2.

PY - 2015/8/3

Y1 - 2015/8/3

N2 - A surface texturing scheme using ablation etching by KrF excimer laser irradiation and chemical wet etching is demonstrated to improve the light-extraction efficiency of GaN-based thin-film flip-chip light-emitting diodes (TFFC-LED). Both simulated and experimental results on the light emission characteristics are presented and discussed. For the TFFC-LED (die size of 1×1 mm2) with the proposed surface roughening scheme, enhancements in light output power (LOP) by 13.08% (12.81%) and wall-plug efficiency (WPE) by 2.87% (2.25%) at 350 mA (700 mA) as compared with that of the TFFC-LED without surface texturing are achieved experimentally.

AB - A surface texturing scheme using ablation etching by KrF excimer laser irradiation and chemical wet etching is demonstrated to improve the light-extraction efficiency of GaN-based thin-film flip-chip light-emitting diodes (TFFC-LED). Both simulated and experimental results on the light emission characteristics are presented and discussed. For the TFFC-LED (die size of 1×1 mm2) with the proposed surface roughening scheme, enhancements in light output power (LOP) by 13.08% (12.81%) and wall-plug efficiency (WPE) by 2.87% (2.25%) at 350 mA (700 mA) as compared with that of the TFFC-LED without surface texturing are achieved experimentally.

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M3 - Conference contribution

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T3 - Device Research Conference - Conference Digest, DRC

SP - 123

EP - 124

BT - 73rd Annual Device Research Conference, DRC 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 73rd Annual Device Research Conference, DRC 2015

Y2 - 21 June 2015 through 24 June 2015

ER -

Lin TH, Wang SJ, Tu YC, Hung CH, You ZS, Chin YH. Enhanced light output of GaN-based thin-film flip-chip light-emitting diodes by surface texturing using laser ablation and chemical etching. In 73rd Annual Device Research Conference, DRC 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 123-124. 7175586. (Device Research Conference - Conference Digest, DRC). doi: 10.1109/DRC.2015.7175586

Enhanced light output of GaN-based thin-film flip-chip light-emitting diodes by surface texturing using laser ablation and chemical etching

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