Abstract
A method was demonstrated for surface texturing through integrating ablation etching by KrF excimer laser irradiation and chemical wet etching designed to improve the light-extraction efficiency of vertically structured GaN-based light-emitting diodes (VLEDs). The fabricated VLEDs with the proposed surface roughening scheme exhibited an increase in light output power by 119.3 and 107% at 350 and 750 mA, respectively, as compared to that of the flat-VLEDs. Such improvements could be attributed to the proposed method that creates a twofold surface roughness to maximize the angular randomization of photons at the emission surface significantly increases the surface area of VLEDs.
Original language | English |
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Pages (from-to) | H53-H57 |
Journal | Electrochemical and Solid-State Letters |
Volume | 14 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2011 |
All Science Journal Classification (ASJC) codes
- General Chemical Engineering
- General Materials Science
- Physical and Theoretical Chemistry
- Electrochemistry
- Electrical and Electronic Engineering