Enhanced sensing performance of relative humidity sensors using laterally grown ZnO nanosheets

Fu Shou Tsai, Shui Jinn Wang

Research output: Contribution to journalArticlepeer-review

76 Citations (Scopus)

Abstract

This study investigates the effectiveness of using laterally oriented zinc oxide (ZnO) nanosheets (NSs) grown by the hydrothermal growth (HTG) method for relative humidity (RH) sensing at room temperature (RT). A sensing response (R12%/R96%) at RT of as high as 220, good sensing linearity in the range of 12-96% RH, a fast sensing response time of as low as 600 s, and a recovery time of 3 s are achieved. Compared to conventional ZnO-nanowire-based humidity sensors, a 100-fold improvement in the sensing response at RT was obtained, which is mainly attributed to the ZnO NSs having a much higher surface-to-volume ratio and a porous-like surface.

Original languageEnglish
Pages (from-to)280-287
Number of pages8
JournalSensors and Actuators, B: Chemical
Volume193
DOIs
Publication statusPublished - 2014 Mar 31

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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