TY - JOUR
T1 - Enhanced sensing performance of relative humidity sensors using laterally grown ZnO nanosheets
AU - Tsai, Fu Shou
AU - Wang, Shui Jinn
N1 - Funding Information:
This work was supported by the National Science Council (NSC) of Taiwan, Republic of China, under grants NSC 100-2221-E-006-045 MY2 and NSC 100-2221-E-006-156 MY2 . The authors would also like to thank the National Nano Device Laboratories and the Center for Micro/Nano Science and Technology, National Cheng Kung University, Taiwan , for equipment access, and financial and technical support.
Copyright:
Copyright 2014 Elsevier B.V., All rights reserved.
PY - 2014/3/31
Y1 - 2014/3/31
N2 - This study investigates the effectiveness of using laterally oriented zinc oxide (ZnO) nanosheets (NSs) grown by the hydrothermal growth (HTG) method for relative humidity (RH) sensing at room temperature (RT). A sensing response (R12%/R96%) at RT of as high as 220, good sensing linearity in the range of 12-96% RH, a fast sensing response time of as low as 600 s, and a recovery time of 3 s are achieved. Compared to conventional ZnO-nanowire-based humidity sensors, a 100-fold improvement in the sensing response at RT was obtained, which is mainly attributed to the ZnO NSs having a much higher surface-to-volume ratio and a porous-like surface.
AB - This study investigates the effectiveness of using laterally oriented zinc oxide (ZnO) nanosheets (NSs) grown by the hydrothermal growth (HTG) method for relative humidity (RH) sensing at room temperature (RT). A sensing response (R12%/R96%) at RT of as high as 220, good sensing linearity in the range of 12-96% RH, a fast sensing response time of as low as 600 s, and a recovery time of 3 s are achieved. Compared to conventional ZnO-nanowire-based humidity sensors, a 100-fold improvement in the sensing response at RT was obtained, which is mainly attributed to the ZnO NSs having a much higher surface-to-volume ratio and a porous-like surface.
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U2 - 10.1016/j.snb.2013.11.069
DO - 10.1016/j.snb.2013.11.069
M3 - Article
AN - SCOPUS:84890932092
SN - 0925-4005
VL - 193
SP - 280
EP - 287
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
ER -