Enhanced white photoluminescence in silicon-rich oxide/SiO2 superlattices by low-energy ion-beam treatment

Chuan Feng Shih, Chu Yun Hsiao, Kuan Wei Su

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

This study presents the crystalline and luminescence properties of silicon-rich oxide (SRO)/SiO2 superlattices in which the SRO layers were prepared with a low-energy (<60 eV) argon ion-beam treatment. Experimental results evidenced that density of the Si nanocrystals (NCs) in the SRO layer was increased by ion-beam treatment after annealing, increasing the surface roughness. The stoichiometry of the as-prepared SRO layer was unchanged but the phase separation of the annealed SRO layer was enhanced by the ion-beam treatment, yielding visible white photoluminescence from the E' centers and Si NCs.

Original languageEnglish
Pages (from-to)15888-15895
Number of pages8
JournalOptics Express
Volume21
Issue number13
DOIs
Publication statusPublished - 2013 Jul 1

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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